Method of manufacture of an iris motion ink jet printer

ABSTRACT

A method of manufacturing an ink jet printhead which includes providing an initial semiconductor wafer having an electrical circuitry layer. A first sacrificial material layer is deposited over the electrical circuitry layer and is etched to define holes for nozzle chamber posts and actuator anchor points. A first expansion material layer of a material having a selected coefficient of thermal expansion is deposited and is etched to form predetermined vias in the first expansion material layer. A conductive material layer is deposited on the first expansion material layer. The conductive material layer is conductively interconnected to the electrical circuitry layer via the vias and is etched to form a heater. A second expansion material layer having a selected coefficient of thermal expansion is deposited and is etched to form a thermal actuator from a combination of the first and second expansion material layers and the conductive layer. The second sacrificial material layer is etched to form a mould. A first inert material layer is deposited to fill the mould. A third sacrificial material layer is deposited over the second sacrificial material layer and the inert material layer and is etched to form a further mould. A second inert material layer is deposited and etched to form a nozzle chamber and an ink ejection port. A ink supply channel is etched through the wafer to be in fluid communication with the nozzle chamber. The sacrificial layers are then etched away.

CROSS REFERENCES TO RELATED APPLICATIONS

The following Australian provisional patent applications are hereby incorporated by cross-reference. For the purposes of location and identification, U.S. patent applications identified by their U.S. patent application Ser. Nos. (ISSN) are listed alongside the Australian applications from which the U.S. patent applications claim the right of priority.

CROSS- REFERENCED U.S. Pat. APPLICATION AUSTRALIAN (CLAIMING RIGHT OF PRIORITY DOC- PROVISIONAL FROM AUSTRALIAN KET PATENT PROVISIONAL APPLICATION) NO. PO7991 09/113,060 ART01 PO8505 09/113,070 ART02 PO7988 09/113,073 ART03 PO9395 09/112,748 ART04 PO8017 09/112,747 ART06 PO8014 09/112,776 ART07 PO8025 09/112,750 ART08 PO8032 09/112,746 ART09 PO7999 09/112,743 ART10 PO7998 09/112,742 ART11 PO8031 09/112,741 ART12 PO8030 09/112,740 ART13 PO7997 09/112,739 ART15 PO7979 09/113,053 ART16 PO8015 09/112,738 ART17 PO7978 09/113,067 ART18 PO7982 09/113,063 ART19 PO7989 09/113,069 ART20 PO8019 09/112,744 ART21 PO7980 09/113,058 ART22 PO8018 09/112,777 ART24 PO7938 09/113,224 ART25 PO8016 09/112,804 ART26 PO8024 09/112,805 ART27 PO7940 09/113,072 ART28 PO7939 09/112,785 ART29 PO8501 09/112,797, U.S. Pat. ART30 No. 6,137,500 PO8500 09/112,796 ART31 PO7987 09/113,071 ART32 PO8022 09/112,824 ART33 PO8497 09/113,090 ART34 PO8020 09/112,823 ART38 PO8023 09/113,222 ART39 PO8504 09/112,786 ART42 PO8000 09/113,051 ART43 PO7977 09/112,782 ART44 PO7934 09/113,056 ART45 PO7990 09/113,059 ART46 PO8499 09/113,091 ART47 PO8502 09/112,753 ART48 PO7981 09/113,055 ART50 PO7986 09/113,057 ART51 PO7983 09/113,054 ART52 PO8026 09/112,752 ART53 PO8027 09/112,759 ART54 PO8028 09/112,757 ART56 PO9394 09/112,758 ART57 PO9396 09/113,107 ART58 PO9397 09/112,829 ART59 PO9398 09/112,792 ART60 PO9399 09/112,791, U.S. Pat. ART61 No. 6,106,147 PO9400 09/112,790 ART62 PO9401 09/112,789 ART63 PO9402 09/112,788 ART64 PO9403 09/112,795 ART65 PO9405 09/112,749 ART66 PP0959 09/112,784 ART68 PP1397 09/112,783 ART69 PP2370 09/112,781 DOT01 PP2371 09/113,052 DOT02 PO8003 09/112,834 Fluid01 PO8005 09/113,103 Fluid02 PO9404 09/113,101 Fluid03 PO8066 09/112,751 IJ01 PO8072 09/112,787 IJ02 PO8040 09/112,802 IJ03 PO8071 09/112,803 IJ04 PO8047 09/113,097 IJ05 PO8035 09/113,099 IJ06 PO8044 09/113,084 IJ07 PO8063 09/113,066 IJ08 PO8057 09/112,778 IJ09 PO8056 09/112,779 IJ10 PO8069 09/113,077 IJ11 PO8049 09/113,061 IJ12 PO8036 09/112,818 IJ13 PO8048 09/112,816 IJ14 PO8070 09/112,772 IJ15 PO8067 09/112,819 IJ16 PO8001 09/112,815 IJ17 PO8038 09/113,096 IJ18 PO8033 09/113,068 IJ19 PO8002 09/113,095 IJ20 PO8068 09/112,808 IJ21 PO8062 09/112,809 IJ22 PO8034 09/112,780 IJ23 PO8039 09/113,083 IJ24 PO8041 09/113,121 IJ25 PO8004 09/113,122 IJ26 PO8037 09/112,793 IJ27 PO8043 09/112,794 IJ28 PO8042 09/113,128 IJ29 PO8064 09/113,127 IJ30 PO9389 09/112,756 IJ31 PO9391 09/112,755 IJ32 PP0888 09/112,754 IJ33 PP0891 09/112,811 IJ34 PP0890 09/112,812 IJ35 PP0873 09/112,813 IJ36 PP0993 09/112,814 IJ37 PP0890 09/112,764 IJ38 PP1398 09/112,765 IJ39 PP2592 09/112,767 IJ40 PP2593 09/112,768 IJ41 PP3991 09/112,807 IJ42 PP3987 09/112,806 IJ43 PP3985 09/112,820 IJ44 PP3983 09/112,821 IJ45 PO7935 09/112,822 IJM01 PO7936 09/112,825 IJM02 PO7937 09/112,826 IJM03 PO8061 09/112,827 IJM04 PO8054 09/112,828 IJM05 PO8065 09/113,111, U.S. Pat. IJM06 No. 6,071,750 PO8055 09/113,108 IJM07 PO8053 09/113,109 IJM08 PO8078 09/113,123 IJM09 PO7933 09/113,114 IJM10 PO7950 09/113,115 IJM11 PO7949 09/113,129 IJM12 PO8060 09/113,124 IJM13 PO8059 09/113,125 IJM14 PO8073 09/113,126 IJM15 PO8076 09/113,119 IJM16 PO8075 09/113,120 IJM17 PO8079 09/113,221 IJM18 PO8050 09/113,116 IJM19 PO8052 09/113,118 IJM20 PO7948 09/113,117 IJM21 PO7951 09/113,113 IJM22 PO8074 09/113,130 IJM23 PO7941 09/113,110 IJM24 PO8077 09/113,112 IJM25 PO8058 09/113,087 IJM26 PO8051 09/113,074 IJM27 PO8045 09/113,089, U.S. Pat. IJM28 No. 6,110,754 PO7952 09/113,088 IJM29 PO8046 09/112,771 IJM30 PO9390 09/112,769 IJM31 PO9392 09/112,770 IJM32 PP0889 09/112,798 IJM35 PP0887 09/112,801 IJM36 PP0882 09/112,800 IJM37 PP0874 09/112,799 IJM38 PP1396 09/113,098 IJM39 PP3989 09/112,833 IJM40 PP2591 09/112,832 IJM41 PP3990 09/112,831, U.S. Pat. IJM42 No. 6,171,875 PP3986 09/112,830 IJM43 PP3984 09/112,836 IJM44 PP3982 09/112,835 IJM45 PP0895 09/113,102 IR01 PP0870 09/113,106 IR02 PP0869 09/113,105 IR04 PP0887 09/113,104 IR05 PP0885 09/112,810 IR06 PP0884 09/112,766 IR10 PP0886 09/113,085 IR12 PP0871 09/113,086 IR13 PP0876 09/113,094 IR14 PP0877 09/112,760 IR16 PP0878 09/112,773 IR17 PP0879 09/112,774 IR18 PP0883 09/112,775 IR19 PP0880 09/112,745, U.S. Pat. IR20 No. 6,152,619 PP0881 09/113,092 IR21 PO8006 09/113,100, U.S. Pat. MEMS02 No. 6,087,638 PO8007 09/113,093 MEMS03 PO8008 09/113,062 MEMS04 PO8010 09/113,064, U.S. Pat. MEMS05 No. 6,041,600 PO8011 09/113,082 MEMS06 PO7947 09/113,081, U.S. Pat. MEMS07 No. 6,067,797 PO7944 09/113,080 MEMS09 PO7946 09/113,079, U.S. Pat. MEMS10 No. 6,044,646 PO9392 09/113,065 MEMS11 PP0875 09/113,078 MEMS12 PP0894 09/113,075 MEMS13

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT

Not applicable.

FIELD OF THE INVENTION

The present invention relates to the manufacture of ink jet printheads and, in particular, discloses a method of manufacture of an ink jet printhead.

BACKGROUND OF THE INVENTION

Many ink jet printing mechanisms are known. Unfortunately, in mass production techniques, the production of ink jet printheads is quite difficult. For example, often, the orifice or nozzle plate is constructed separately from the ink supply and ink ejection mechanism and bonded to the mechanism at a later stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)). The separate material processing steps required in handling such precision devices often add a substantial expense in manufacturing.

Additionally, side shooting ink jet technologies (U.S. Pat. No. 4,899,181) are often used but again, this limits the amount of mass production throughput given any particular capital investment.

Additionally, more esoteric techniques are also often utilised. These can include electroforming of nickel stage (Hewlett-Packard Journal, Vol. 36 no 5, pp33-37 (1985)), electro-discharge machining, laser ablation (U.S. Pat. No. 5,208,604), micro-punching, etc.

The utilisation of the above techniques is likely to add substantial expense to the mass production of ink jet print heads and therefore add substantially to their final cost.

It would therefore be desirable if an efficient system for the mass production of ink jet printheads could be developed.

SUMMARY OF THE INVENTION

It is the object of the present invention to provide an alternative form of drop on demand ink jet printing which utilises a series of actuators to produce an “iris motion effect” to cause the ejection of ink from a nozzle chamber.

In accordance with a first aspect of the present invention, there is provided a method of manufacturing an iris motion ink jet printhead wherein an array of nozzles are formed on a substrate utilising planar monolithic deposition, lithographic and etching processes. Preferably, multiple ink jet printheads are formed simultaneously on a single planar substrate such as a silicon wafer.

The printheads can be formed utilising standard vlsi/ulsi processing and can include integrate drive electronics formed on the same substrate. The drive electronics are preferably of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate.

In accordance with a further aspect of the present invention, there is provided a method of manufacture of an ink jet printhead arrangement including a series of nozzle chambers, the method comprising the steps of: (a) providing an initial semiconductor wafer having an electrical circuitry layer formed thereon; (b) depositing and etching a first sacrificial material layer over the electrical circuitry layer, the etching including etching holes for nozzle chamber posts and actuator anchor points in the first sacrificial material layer located around the vias; (c) depositing and etching a first expansion material layer of a material having a high coefficient of thermal expansion, the etching including etching predetermined vias in the first expansion material layer; (d) depositing and etching a first conductive layer on the first expansion material layer, the first conductive material layer being conductively interconnected to the electrical circuitry layer via the vias; (e) depositing and etching a second expansion material layer of a material having a high coefficient of thermal expansion, the etching including forming a thermal actuator from a combination of the first and second expansion material layers and the first conductive layer; (f) depositing and etching a second sacrificial material layer, the etching forming a mould for a series of nozzle chamber posts and a series of vane elements; (g) depositing and etching a first inert material layer filling the mould; (h) depositing and etching a third sacrificial layer over the second sacrificial layer and the inert material layer, the etching including etching a mould for interconnection of nozzle chamber walls with the series of nozzle chamber posts; (i) depositing and etching a second inert material layer to form the nozzle chamber, including etching an ink ejection port in the second inert material layer; (j) etching an ink supply channel through the wafer to be interconnected with the nozzle chamber; and (k) etching away the sacrificial layers.

The vane elements are preferably arranged around the ink ejection nozzle.

The step (i) preferably includes etching a series of small holes in the inert material layer. Further, the first and second expansion material layers can comprise substantially polytetrafluoroethylene and the inert material layer can comprise substantially glass.

The ink supply channel can be formed by etching a channel from the back surface of the wafer.

The steps are preferably also utilized to simultaneously separate the wafer into separate printheads.

BRIEF DESCRIPTION OF THE DRAWINGS

Notwithstanding any other forms which may fall within the scope of the present invention, preferred forms of the invention will now be described, by way of example only, with reference to the accompanying drawings in which:

FIG. 1 is a perspective view of a nozzle arrangement with actuators of the nozzle arrangement being in a quiescent condition, constructed in accordance with the preferred embodiment;

FIG. 2 is a perspective view of the nozzle arrangement with the actuators in an expanded condition, constructed in accordance with the preferred embodiment;

FIG. 3 is an exploded perspective view of the nozzle arrangement illustrating the construction in accordance with the preferred embodiment;

FIG. 4 provides a legend of the materials indicated in FIGS. 5 to 16;

FIG. 5 shows a wafer incorporating drive transistors, data distribution and timing circuits for use in a method of this invention;

FIG. 6 shows the wafer of FIG. 5 with a sacrificial layer etched to define nozzle chamber posts and actuator anchor points;

FIG. 7 shows the wafer of FIG. 6 etched to define a heater vias;

FIG. 8 shows the wafer of FIG. 7 with a conductor patterned thereon;

FIG. 9 shows the wafer of FIG. 8 with PTFE etched to define actuators;

FIG. 10 shows the wafer of FIG. 9 etched to define iris paddle vanes and nozzle chamber posts;

FIG. 11 shows the wafer of FIG. 10 with sacrificial material etched down to glass;

FIG. 12 shows the wafer of FIG. 11 etched to define a nozzle rim;

FIG. 13 shows the wafer of FIG. 12 etched to define a roof of a nozzle chamber;

FIG. 14 shows the wafer of FIG. 13 back-etched to define ink inlets;

FIG. 15 shows the wafer of FIG. 14 etched to clear the nozzle chamber, free the actuators and separate the printhead chips; and

FIG. 16 shows a nozzle arrangement filled with ink.

DESCRIPTION OF PREFERRED AND OTHER EMBODIMENTS

In the preferred embodiment, there is a provided an ink jet printhead with a series of nozzles, each nozzle including an actuator device comprising a plurality of actuators which actuate a series of paddles that operate in an iris type motion so as to cause the ejection of ink from a nozzle chamber.

Turning initially to FIG. 1 to FIG. 3, there is illustrated a single nozzle arrangement 10 for the ejection of ink from a nozzle ejection port 11. The ink is ejected out of the nozzle port 11 from a nozzle chamber 12 which is formed from 4 substantially identical iris vanes 14. Each iris vane 14 is acted upon simultaneously to cause the ink within the nozzle chamber 12 to be squeezed out of the nozzle chamber, thereby ejecting the ink from ink ejection port 11.

Each nozzle vane 14 is actuated by means of a thermal actuator 15 mounted on its base. Each thermal actuator 15 has two arms, an expanding, flexible arm 25 and a fixed arm 26. Both arms are fixed at one end 27 and are joined at the other end 28. The expanding arm 25 can be constructed from a polytetrafluoroethylene (PTFE) layer 29, inside of which is constructed a serpentine copper heater 16. The rigid arms 26 of the thermal actuators 15 comprise return trays of the copper heater 16 and the vane 14. The result of the heating of the expandable arm 25 of the thermal actuator 15 is that the PTFE layer 34 bends around thereby causing the vane 14 to push ink towards a centre of the nozzle chamber 12. The serpentine copper layer 16 expands, concertina-fashion, in response to the high thermal expansion of the PTFE layer 34. The other vanes 18-20 are actuated simultaneously. The four vanes therefore cause a general compression of the ink within the nozzle chamber 12 resulting in a subsequent ejection from the ink ejection port 11.

A roof of the nozzle arrangement 10 is formed from a nitride layer 22 and is supported by posts 23. The nitride top layer 22 includes a series of holes 24 which are provided in order to facilitate more rapid etching of sacrificial materials within the lower layers during construction. The nitride layer etchant holes 24 are of a diameter which is sufficiently small so that surface tension effects are sufficient to stop any ink being ejected from the nitride holes 24 as opposed to the ink ejection port 11 upon activation of the vanes 14, 18-20.

The arrangement of FIG. 1 can be constructed on a silicon wafer utilising standard semi-conductor fabrication and micro-electro-mechanical systems (MEMS) techniques. For a general introduction to a micro-electro mechanical system (MEMS) reference is made to standard proceedings in this field including the proceedings of the SPIE (International Society for Optical Engineering), volumes 2642 and 2882 which contain the proceedings for recent advances and conferences in this field. The nozzle arrangement 10 can be constructed on a silicon wafer and built up by utilising various sacrificial materials where necessary as is common practice with MEMS constructions. Turning to FIG. 3, there is illustrated an exploded perspective view of a single nozzle arrangement 10 illustrating the various layers utilised in the construction of a single nozzle arrangement 10. The lowest layer of the construction comprises a silicon wafer base 30. A large number of printheads each having a large number of nozzle arrangements 10 can be constructed on a single large wafer which is appropriately diced into separate printheads in accordance with requirements. A CMOS circuitry/glass layer 31 which provides all the necessary interconnections and driving control circuitry for the various heater circuits is constructed on top of the base 30. A nitride passivation layer 32 which is provided for passivating the lower CMOS layer 31 against any etchants which may be utilised is constructed on top of the layer 31. A layer 32 having the appropriate vias (not shown) for connecting the heating elements to the relevant portion of the lower CMOS layer 31 is provided.

A copper layer 33 which includes the various heater element circuits in addition to vias to the lower CMOS layer is constructed on the nitride layer 32.

Next, a PTFE layer 34 is provided with the PTFE layer 34 actually comprising 2 layers which encase the copper layer 33. Next, a first nitride layer 36 is constructed for the vanes 14, 18-20 of FIG. 1. On top of this is a second nitride layer 37 which forms the posts 23 and nozzle roof of the nozzle chamber 12.

The various layers 33, 34, 36 and 37 can be constructed utilising intermediate sacrificial layers which are, as standard with MEMS processes, subsequently etched away so as to release the functional device. Suitable sacrificial materials include glass. When necessary, such as in the construction of the nitride layer 37, various other semiconductor processes such as dual damascene processing can be utilised.

One form of detailed manufacturing process which can be used to fabricate monolithic ink jet printheads operating in accordance with the principles taught by the present embodiment can proceed utilizing the following steps:

1. Using a double-sided, polished wafer 30, complete drive transistors, data distribution, and timing circuits using a 0.5 micron, one poly, 2 metal CMOS process 31. The wafer is passivated with 0.1 microns of silicon nitride 32. Relevant features of the wafer at this step are shown in FIG. 5. For clarity, these diagrams may not be to scale, and may not represent a cross section though any single plane of the nozzle. FIG. 4 is a key to representations of various materials in these manufacturing diagrams, and those of other cross referenced ink jet configurations.

2. Deposit 1 micron of sacrificial material 50 (e.g. aluminum or photosensitive polyimide)

3. Etch the sacrificial layer using Mask 1. This mask defines the nozzle chamber posts and the actuator anchor points e.g. 51. This step is shown in FIG. 6.

4. Deposit 1 micron of PTFE 52.

5. Etch the PTFE, nitride, and oxide down to second level metal using Mask 2. This masks defines the heater vias. This step is shown in FIG. 7.

6. Deposit 1 micron of a conductor 33 with a low Young's modulus, for example aluminum or gold.

7. Pattern the conductor using Mask 3. This step is shown in FIG. 8.

8. Deposit 1 micron of PTFE 53.

9. Etch the PTFE down to the sacrificial layer using Mask 4. This mask defines the actuators. This step is shown in FIG. 9.

10. Wafer probe. All electrical connections are complete at this point, bond pads are accessible, and the chips are not yet separated.

11. Deposit 6 microns of sacrificial material 54.

12. Etch the sacrificial material using Mask 5. This mask defines the iris paddle vanes 14, 18-20 and the nozzle chamber posts. This step is shown in FIG. 10.

13. Deposit 3 microns of PECVD glass 55 and planarize down to the sacrificial layer using CMP.

14. Deposit 0.5 micron of sacrificial material 56.

15. Etch the sacrificial material down to glass using Mask 6. This mask defines the nozzle chamber posts. This step is shown in FIG. 11.

16. Deposit 3 microns of PECVD glass 57.

17. Etch to a depth of (approx.) 1 micron using Mask 7. This mask defines the nozzle rim 58. This step is shown in FIG. 12.

18. Etch down to the sacrificial layer using Mask 8. This mask defines the roof of the nozzle chamber, the nozzle 11, and the sacrificial etch access holes 24. This step is shown in FIG. 13.

19. Back-etch completely through the silicon wafer (with, for example, an ASE Advanced Silicon Etcher from Surface Technology Systems) using Mask 9. This mask defines the ink inlets 59 which are etched through the wafer. When the silicon layer is etched, change the etch chemistry to etch the glass and nitride using the silicon as a mask. The wafer is also diced by this etch. This step is shown in FIG. 14.

20. Etch the sacrificial material. The nozzle chambers are cleared, the actuators freed, and the printhead chips are separated by this etch. This step is shown in FIG. 15.

21. Mount the printhead chips in their packaging, which may be a molded plastic former incorporating ink channels which supply the appropriate color ink to the ink inlets at the back of the wafer.

22. Connect the printhead chips to their interconnect systems. For a low profile connection with minimum disruption of airflow, TAB may be used. Wire bonding may also be used if the printer is to be operated with sufficient clearance to the paper.

23. Hydrophobize the front surface of the printhead chips.

24. Fill the completed printhead chips with ink 60 and test them. A filled nozzle arrangement is shown in FIG. 16.

It will be understood by those skilled in the art that many other forms of construction may be possible utilising a wide range of materials having suitable characteristics without departing from the spirit or scope of the invention as broadly described. The present embodiment is, therefore, to be considered in all respects to be illustrative and not restrictive.

The presently disclosed ink jet printing technology is potentially suited to a wide range of printing systems including: color and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers, high speed pagewidth printers, notebook computers with in-built pagewidth printers, portable color and monochrome printers, color and monochrome copiers, color and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic ‘minilabs’, video printers, PHOTO CD (PHOTO CD is a registered trade mark of the Eastman Kodak Company) printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.

Ink Jet Technologies

The embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable.

The most significant problem with thermal ink jet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal ink jet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.

The most significant problem with piezoelectric ink jet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per print head, but is a major impediment to the fabrication of pagewidth print heads with 19,200 nozzles.

Ideally, the ink jet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications. To meet the requirements of digital photography, new ink jet technologies have been created. The target features include:

low power (less than 10 Watts)

high resolution capability (1,600 dpi or more)

photographic quality output

low manufacturing cost

small size (pagewidth times minimum cross section)

high speed (<2 seconds per page).

All of these features can be met or exceeded by the ink jet systems described below with differing levels of difficulty. Forty-five different ink jet technologies have been developed by the Assignee to give a wide range of choices for high volume manufacture. These technologies form part of separate applications assigned to the present Assignee as set out in the list under the heading Cross References to Related Applications.

The ink jet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems

For ease of manufacture using standard process equipment, the print head is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing For color photographic applications, the print head is 100 mm long, with a width which depends upon the ink jet type. The smallest print head designed is covered in U.S. patent application No. 09/112,764, which is 0.35 mm wide, giving a chip area of 35 square mm. The print heads each contain 19,200 nozzles plus data and control circuitry.

Ink is supplied to the back of the print head by injection molded plastic ink channels. The molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tool. Ink flows through holes etched through the waiter to the nozzle chambers fabricated on the front surface of the wafer. The print head is connected to the camera circuitry by tape automated bonding.

Tables of Drop-on-Demand Ink Jets

Eleven important characteristics of the fundamental operation of individual ink jet nozzles have been identified. These characteristics are largely orthogonal, and so can be elucidated as an eleven dimensional matrix. Most of the eleven axes of this matrix include entries developed by the present assignee.

The following tables form the axes of an eleven dimensional table of ink jet types.

Actuator mechanism (18 types)

Basic operation mode (7 types)

Auxiliary mechanism (8 types)

Actuator amplification or modification method (17 types)

Actuator motion (19 types)

Nozzle refill method (4 types)

Method of restricting back-flow through inlet (10 types)

Nozzle clearing method (9 types)

Nozzle plate construction (9 types)

Drop ejection direction (5 types)

Ink type (7 types)

The complete eleven dimensional table represented by these axes contains 36.9 billion possible configurations of ink jet nozzle. While not all of the possible combinations result in a viable ink jet technology, many million configurations are viable. It is clearly impractical to elucidate all of the possible configurations. Instead, certain ink jet types have been investigated in detail. Forty-five such ink jet types were filed simultaneously to the present application.

Other ink jet configurations can readily be derived from these forty-five examples by substituting alternative configurations along one or more of the 11 axes. Most of the forty-five examples can be made into ink jet print heads with characteristics superior to any currently available ink jet technology.

Where there are prior art examples known to the inventor, one or more of these examples are listed in the examples column of the tables below. The simultaneously filed patent applications by the present applicant are listed by USSN numbers. In some cases, a print technology may be listed more than once in a table, where it shares characteristics with more than one entry.

Suitable applications for the ink jet technologies include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.

The information associated with the aforementioned 11 dimensional matrix are set out in the following tables. 

What is claimed is:
 1. A method of manufacture of an ink jet printhead including a series of nozzle chambers, the method comprising the steps of; (a) providing an initial semiconductor wafer having an electrical circuitry layer formed thereon; (b) depositing a first sacrificial material layer over the electrical circuitry layer and etching the first sacrificial material layer to define holes for nozzle chamber posts and actuator anchor points in the first sacrificial material layer; (c) depositing a first expansion material layer of a material having a suitable coefficient of thermal expansion, and etching predetermined vias in the first expansion material layer so that the holes for the nozzle chamber posts and the actuator anchor points are located around the vias; (d) depositing a conductive material layer on the first expansion material layer, the conductive material layer being conductively interconnected to the electrical circuitry layer via the vias and etching the conductive layer to form a heater; (e) depositing a second expansion material layer of a material having a suitable coefficient of thermal expansion, and etching the second expansion material layer to form a thermal actuator from a combination of the first and second expansion material layers and the conductive layer; (f) depositing a second sacrificial material layer, and etching the second sacrificial material layer to form a mould for a series of nozzle chamber posts and a series of vane elements; (g) depositing a first inert material layer to fill said mould and etching the first inert material layer; (h) depositing a third sacrificial material layer over the second sacrificial material layer and the inert material layer, and etching the third sacrificial material layer to form a mould for nozzle chamber walls interconnected with the nozzle chamber posts; (i) depositing a second inert material layer and etching the second inert material layer to form the nozzle chamber and an ink ejection port in the second inert material layer; (j) etching an ink supply channel through the wafer to be in fluid communication with the nozzle chamber; and (k) etching away the sacrificial layers.
 2. A method as claimed in claim 1 wherein the second sacrificial layer is etched so that the vane elements are arranged around the ink ejection port.
 3. A method as claimed in claim 1 wherein a series of small holes are etched in the second inert material layer which are small enough so that surface tension effects inhibit the ejection of ink from the holes.
 4. A method as claimed in claim 1 wherein the first and second expansion material layers comprise substantially polytetrafluoroethylene.
 5. A method as claimed in claim 1 wherein the inert material layer comprises substantially glass.
 6. A method as claimed in claim 1 wherein the ink supply channel is formed by etching a channel from the back surface of the wafer.
 7. A method as claimed in claim 1 further including the step of depositing corrosion barriers over portions of the arrangement to reduce corrosion effects.
 8. A method as claimed in claim 1 wherein the wafer comprises a double-sided polished CMOS wafer.
 9. A method as claimed in claim 1 wherein the wafer is separate into separate printhead chips. 